{The Fact About applied rtp That No One Is Suggestin
{The Fact About applied rtp That No One Is Suggestin
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Simulation success exhibit which the adopted neural fuzzy networks can not just proper the pyrometer reading through precisely, but additionally be capable to keep track of a temperature trajectory very properly.
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Swift thermal processing (RTP) has become considered from a production standpoint as a potential know-how for depositing slender films by low-tension chemical vapor deposition (LPCVD) inside of a…
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We now have studied lamp configuration style and design for quick thermal processing (RTP) programs. We considered a configuration consisting of four concentric round lamp zones, three of them previously mentioned the wafer…
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